Mask Shot Count Reduction Strategies in the OPC FlowWORD, James; MIZUUCHI, Keisuke; SAI FU et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 70283F.1-70283F.11, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

Dense OPC for 65nm and belowCOBB, Nicolas B; GRANIK, Yuri.Proceedings of SPIE, the International Society for Optical Engineering. 2005, issn 0277-786X, isbn 0-8194-6014-1, 2Vol, Part 2, 599259.1-599259.12Conference Paper

The Impact of Scanner Model Vectorization On Optical Proximity CorrectionTYMINSKI, Jacek K; NAKASHIMA, Tashiharu; QIAOLIN ZHANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66071L.1-66071L.12, issn 0277-786X, isbn 978-0-8194-6745-4Conference Paper

Improving OPC quality via interactions within the design- to- manufacturing flowGUPTA, P; KAHNG, A. B; PARK, C.-H et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-5853-8, 2Vol, Part 1, 131-140Conference Paper

Comparison of OPC models with and without 3D-mask effectSER, Jung-Hoon; PARK, Tae-Hoon; JEONG, Moon-Gyu et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7640, issn 0277-786X, isbn 978-0-8194-8054-5 0-8194-8054-1, 76401T.1-76401T.6, 2Conference Paper

Implementation of Multiple ROI with single FOV for advanced mask metrologyJEONG, Kyu-Hwa; FREZGHI, Hatsey; TAVASSOLI, Malahat et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 72724D.1-72724D.9, 2Conference Paper

Physical Simulation for Verification and OPC on Full Chip LevelSHIM, Seongbo; MOON, Seongho; KIM, Youngchang et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7973, issn 0277-786X, isbn 978-0-8194-8532-8, 79732I.1-79732I.9, 2Conference Paper

Model-Based adaptive FragmentationLIU, Daisy; CHENG HE LI; XIAO HUI KANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7275, issn 0277-786X, isbn 978-0-8194-7528-2 0-8194-7528-9, 1Vol, 72751I.1-72751I.5Conference Paper

Enhancing OPC Model Stability and Predictability Using SEM Image ContoursEL-DIN HABIB, Mohamed Serag.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7122, issn 0277-786X, isbn 978-0-8194-7355-4 0-8194-7355-3, 712244.1-712244.9, 2Conference Paper

Cell-Based OPC with Standard-Cell Fill InsertionLIANG DENG; CHAO, Kai-Yuan; HUA XIANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 69251L.1-69251L.8, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

Flexible sparse and dense OPC algorithmsCOBB, Nick.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-5853-8, 2Vol, Part 2, 693-702Conference Paper

Impact of Scanner Signatures on Optical Proximity CorrectionTYMINSKI, Jacek K; MATSUYAMA, Tomoyuki; LU, Yen-Liang et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7640, issn 0277-786X, isbn 978-0-8194-8054-5 0-8194-8054-1, 76400V.1-76400V.11, 2Conference Paper

Double-Patterning-Friendly OPCXIAOHAI LI; LUK-PAT, Gerry; CORK, Chris et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7274, issn 0277-786X, isbn 978-0-8194-7527-5 0-8194-7527-0, 727414.1-727414.12, 2Conference Paper

Flare mitigation strategies in extreme ultraviolet lithographyKIM, Insung; MYERS, Alan; MELVIN, Lawrence S et al.Microelectronic engineering. 2008, Vol 85, Num 5-6, pp 738-743, issn 0167-9317, 6 p.Conference Paper

Optimization of illumination pupils and mask structures for proximity printingMOTZEK, K; BICH, A; HUDEK, P et al.Microelectronic engineering. 2010, Vol 87, Num 5-8, pp 1164-1167, issn 0167-9317, 4 p.Conference Paper

Efficient approach to improving pattern fidelity with multi OPC model and recipeDO, Munhoe; KANG, Jaehyun; CHOI, Jaeyoung et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 63494P.1-63494P.12, issn 0277-786X, isbn 0-8194-6444-9, 2VolConference Paper

E-beam Shot Count Estimation at 32 nm HP and BeyondCHOI, Jin; SANG HEE LEE; NAM, Dongseok et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7379, issn 0277-786X, isbn 978-0-8194-7656-2 0-8194-7656-0, 1Vol, 737917.1-737917.9Conference Paper

Empirical study of OPC metrology requirements for 32-nm node logicWARD, Brian S; ZAVYLOVA, Lena; DE BISSCHOP, Peter et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7122, issn 0277-786X, isbn 978-0-8194-7355-4 0-8194-7355-3, 712242.1-712242.10, 2Conference Paper

Evaluation of OPC Test Patterns using Parameter SensitivityWARD, Brian S.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 69243S.1-69243S.12, issn 0277-786X, isbn 978-0-8194-7109-3Conference Paper

Optimal Photomask Printability using Interactive OPC with a New Calibration MethodologyBAROUCH, Eytan; KNODLE, Stephen L.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66071P.1-66071P.8, issn 0277-786X, isbn 978-0-8194-6745-4Conference Paper

Scanner-characteristics-aware OPC modeling and correctionTYMINSKI, Jacek K; QIAOLIN ZHANG; LUCAS, Kevin et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65210Z.1-65210Z.13, issn 0277-786X, isbn 978-0-8194-6640-2Conference Paper

Shot based MRC flow by using full chip MRC toolJI, Min-Kyu; JANG, Sung-Hoon; SON, Sung-Jun et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 66070V.1-66070V.11, issn 0277-786X, isbn 978-0-8194-6745-4Conference Paper

Fractal model applied wavefront aberration for the expression of local flareNAKASHIMA, Toshiharu; OGATA, Taro.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6197-0, vol 3, 615433.1-615433.10Conference Paper

eMET: 50keV electron multibeam Mask Exposure ToolKLEIN, Christof; KLIKOVITS, Jan; LOESCHNER, Hans et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7970, issn 0277-786X, isbn 978-0-8194-8529-8, 79700C.1-79700C.6Conference Paper

Library-based performance-based OPCTEH, Siew-Hong; HENG, Chun-Huat; TAY, Arthur et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7641, issn 0277-786X, isbn 978-0-8194-8055-2 0-8194-8055-X, 76410X.1-76410X.10Conference Paper